Integrated Humidity Sensors

Authored by: Ghenadii Korotcenkov

Handbook of Humidity Measurement

Print publication date:  February  2019
Online publication date:  January  2019

Print ISBN: 9781138300224
eBook ISBN: 9780203731888
Adobe ISBN:

10.1201/b22370-21

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Abstract

This chapter considers integrated humidity sensors, the development of which is related to the need to solve two problems: (1) improving the control and stabilization of the sensor temperature and (2) reducing the influence of parasitic capacitances. In connection with this, the development of integrated humidity sensors is conducted currently in two directions. That is the development of the humidity sensors integrated with the heater and the monolithic integration of the humidity sensors with the readout circuitry. A detailed description of these approaches, including their advantages and limitations, is given in this chapter. The technologies used in the manufacture of such sensors are also considered.

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