Hetero-Junction-Based Humidity Sensors

Authored by: Ghenadii Korotcenkov

Handbook of Humidity Measurement

Print publication date:  February  2019
Online publication date:  January  2019

Print ISBN: 9781138300224
eBook ISBN: 9780203731888
Adobe ISBN:

10.1201/b22370-17

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Abstract

Hetero-junction-based humidity sensors form a group of devices based on the use of Schottky barriers and p-n hetero-contacts as elements sensitive to humidity influence. This influence is effected through the change in the work function of the contacting materials, or the contact potential, or built-in voltage, of the diode caused by interaction with water vapor at the interface of two materials. The response can be due either to adsorption of the species at the metal surface, affecting interfacial polarization by formation of a dipole layer, or to the absorption of gases or water. This chapter describes the approaches used in the development of such sensors and considers the principles of operation and sensor performances. As a rule, hetero-junction-based humidity sensors are made on the basis of metal oxides and conventional semiconductors. Sensing mechanisms for different structures are also analyzed in this chapter.

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