Cantilever- and Membrane-Based Humidity Sensors

Authored by: Ghenadii Korotcenkov

Handbook of Humidity Measurement

Print publication date:  February  2019
Online publication date:  January  2019

Print ISBN: 9781138300224
eBook ISBN: 9780203731888
Adobe ISBN:

10.1201/b22370-13

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Abstract

As follows from the title of this chapter, the main elements of the considered mass-sensitive humidity sensors are the membrane (diaphragm) and microcantilevers. This chapter gives a detailed description of these sensors, including consideration of the configuration of sensors, modes of operation, sorption models, and methods of deflection detection. Humidity-sensitive materials suitable for use in such sensors are also discussed. Considerable attention is given to the consideration of examples of humidity sensors implementation. In particular, a description is given of the functionalization methods and approaches used for the development of capacitive humidity sensors and piezoresistive humidity sensors. Advantages and disadvantages of cantilever and membrane-based humidity sensors are also analyzed. It is shown that the sensors under consideration can have very high sensitivity.

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