Methods for Quickly Measuring Surface Cleanliness

Authored by: Nikolay L. Kazanskiy , Vsevolod A. Kolpakov

Optical Materials

Print publication date:  March  2017
Online publication date:  March  2017

Print ISBN: 9781138197282
eBook ISBN: 9781315279930
Adobe ISBN:

10.1201/b21918-2

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Abstract

If diffractive optics is to continue developing, the existing range and functions of DOEs need to be expanded. This calls for more stringent cleanliness requirements for substrate surfaces since the quality of a diffraction microrelief depends on surface cleanliness. Stable and reproducible surface properties that meet the process requirements ensure that masks deposited on surfaces through the thin-film technique [108] demonstrate the desired parameters.

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