MEMS Technologies

Authored by: Antonio Luque , José M. Quero , Carles Cané

The Industrial Electronics Handbook

Print publication date:  March  2011
Online publication date:  April  2016

Print ISBN: 9781439802793
eBook ISBN: 9781439802809
Adobe ISBN:

10.1201/b10602-17

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Abstract

The term “microelectro-mechanical systems” (MEMS) refers to any device whose characteristic dimension lies in the range of micrometers. This general definition encompasses not only devices whose main effects are electrical or mechanical, but also those that deal with optical, chemical, biological, or others. MEMS are usually referred to as “microsystems” in Europe or “micromachines” in Asia.

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