MEMS Devices

Authored by: José M. Quero , Antonio Luque , Luis Castañer , Angel Rodríguez , Adrian Ionescu , Montserrat Fernández-Bolaños , Lorenzo Faraone , John M. Dell

The Industrial Electronics Handbook

Print publication date:  March  2011
Online publication date:  April  2016

Print ISBN: 9781439802793
eBook ISBN: 9781439802809
Adobe ISBN:

10.1201/b10602-16

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Abstract

Since the appearance of microelectromechanical systems (MEMS) technologies in the early 1950s, a traditional classification in two main classes, sensors and actuators, regarding the direction of its interaction with their surroundings, has been accepted. However, the large increase of new concepts and applications make this rather minimalist, and the increase in their functionality deserves a wider description.

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