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Mismatched Heteroepitaxial Growth and Strain Relaxation: I. Uniform Layers

Authored by: John E. Ayers , Tedi Kujofsa , Paul Rago , Johanna E. Raphael

Heteroepitaxy of Semiconductors

Print publication date:  October  2016
Online publication date:  October  2016

Print ISBN: 9781482254358
eBook ISBN: 9781315372440
Adobe ISBN:


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Rarely is heteroepitaxial growth lattice matched. In almost all cases of interest, the epitaxial layer has a relaxed lattice constant that is different from that of the substrate. The lattice mismatch strain* (misfit strain) can be defined as 5.1 f≡as−aeae,

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