Metrics

Views
730

In This Chapter

Mismatched Heteroepitaxial Growth and Strain Relaxation: I. Uniform Layers

Authored by: John E. Ayers , Tedi Kujofsa , Paul Rago , Johanna E. Raphael

Heteroepitaxy of Semiconductors

Print publication date:  October  2016
Online publication date:  October  2016

Print ISBN: 9781482254358
eBook ISBN: 9781315372440
Adobe ISBN:

10.1201/9781315372440-6

 Download Chapter

 

Abstract

Rarely is heteroepitaxial growth lattice matched. In almost all cases of interest, the epitaxial layer has a relaxed lattice constant that is different from that of the substrate. The lattice mismatch strain* (misfit strain) can be defined as 5.1 f≡as−aeae,

 Cite
Search for more...
Back to top

Use of cookies on this website

We are using cookies to provide statistics that help us give you the best experience of our site. You can find out more in our Privacy Policy. By continuing to use the site you are agreeing to our use of cookies.