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Material or Process Book or Chapter Title Author or Editor Publication dates

Heteroepitaxy of Semiconductors

Theory, Growth, and Characterization

Edited by: John E. Ayers , Tedi Kujofsa , Paul Rago , Johanna E. Raphael

Print publication date:  October  2016
Online publication date:  October  2016

Print ISBN: 9781482254358
eBook ISBN: 9781315372440
Adobe ISBN:

10.1201/9781315372440
 Cite  Marc Record

Book description

In the past ten years, heteroepitaxy has continued to increase in importance with the explosive growth of the electronics industry and the development of a myriad of heteroepitaxial devices for solid state lighting, green energy, displays, communications, and digital computing. Our ever-growing understanding of the basic physics and chemistry underlying heteroepitaxy, especially lattice relaxation and dislocation dynamic, has enabled an ever-increasing emphasis on metamorphic devices. To reflect this focus, two all-new chapters have been included in this new edition. One chapter addresses metamorphic buffer layers, and the other covers metamorphic devices. The remaining seven chapters have been revised extensively with new material on crystal symmetry and relationships, III-nitride materials, lattice relaxation physics and models, in-situ characterization, and reciprocal space maps.

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