NVM Process Technology and Integration Scheme

Authored by: Arup Bhattacharyya

Silicon Based Unified Memory Devices and Technology

Print publication date:  June  2017
Online publication date:  July  2017

Print ISBN: 9781138032712
eBook ISBN: 9781315206868
Adobe ISBN:

10.1201/9781315206868-9

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Abstract

Chapter Outline

This chapter briefly outlines the evolution of the NVM process technology from its inception to the turn of the century. The NVM technology is an extension of the silicon based FET microelectronics process and integration technology, and closely followed its evolution and transition. Consequently, the NVM process technology started as a metal-gate technology in the 1970s, changed into CMOS silicon gate in the late 1980s, and into CMOS metal gate during the past decade following the ITRS roadmap of CMOS feature size scaling. The chapter emphasizes the unique elements to fabricate the NVM devices, within the framework of the basic CMOS process technology, for logic and peripheral circuits.

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