Pumping Vacuum Systems

Authored by: Igor Bello

Vacuum and Ultravacuum

Print publication date:  November  2017
Online publication date:  November  2017

Print ISBN: 9781498782043
eBook ISBN: 9781315155364
Adobe ISBN:

10.1201/9781315155364-9

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Abstract

The gas flow theory enables us to determine gas flows in stationary flow regimes, that is, under the conditions when the gas flow regimes are invariable along the entire length of the tube and independent of the time. However, in actual vacuum systems, when the flow regime is changed with dropping pressure, the important parameters are the rate of pressure drop and pumping time for which the required pressure is obtained by the pumping action. 378 The pumping time of vacuum systems is always a concern because it affects the economical processing of industrial products. The cost efficiency of vacuum processes depends on the design of vacuum systems, their construction, and properties of pumping units because these parameters determine the final pressure and time for which the required pressure is obtained. Although a vacuum pumping unit may have certain parameters that are greater than those needed for a target technological or analytical process, its integration into a vacuum system may not provide a satisfactory performance. Coupling the processing chamber and pumping unit, construction of a vacuum system, tubing, and gas load due to the secondary gas sources may lower the performance of the vacuum system. Therefore, vacuum systems should be designed economically with respect to the system parameters that include the cost-effective pumping time, which is related to the effective pumping speed and final pressure that can be obtained. 379 , 380

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