Dry Displacement Pumps

Authored by: Igor Bello

Vacuum and Ultravacuum

Print publication date:  November  2017
Online publication date:  November  2017

Print ISBN: 9781498782043
eBook ISBN: 9781315155364
Adobe ISBN:


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Dry vacuum pumps are vacuum devices with new technological concepts, which are developed due to the industrial demands. Especially semiconductor device fabrication, food, and pharmaceutical industry require transport pumps that produce vacuum free of contamination. Lessard 417 published a paper on dry vacuum pumps for the semiconductor industry. Virtually all these devices were originally designed as gas blowers and compressors and later adapted for production of contamination-free vacuum also called dry vacuum. Under the term dry vacuum pumps are understood the systems in which no liquid is in contact with the pumped gases, and no liquid is needed to produce vacuum and remove gases out of the pump interior. The technical design, and uniqueness of dry vacuum pumps, impellers/pistons, and stator housings as well as technical characteristics of these pumps may differ, but their operation principle is periodic and continuous increasing and reducing their operation volumes, or trapping of gases between the lobe impellers and stators and transporting them to the pump outlet. Thus, the pumping speeds of dry pumps can be estimated by calculation as previously illustrated for rotary vane and piston oil pumps. The group of dry pumps, discussed herein, comprises rotary vane, piston, diaphragm, scroll, Roots, screw, claw, and hook pumps.

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