Abstract

X-ray microscopy has established itself as a standard microscopic investigation technique alongside optical and charged particle microscopy. The penetrating power of x-rays allows three-dimensional computed tomography imaging at microscopic scales. The sensitivity of x-ray interactions to the electronic structure and chemical bonds provides additional spectroscopic contrast mechanisms. This entry describes the types of mainstream microscopes, the materials and structures used for x-ray optical elements, considerations for x-ray sources, contrast mechanisms, and some selected application areas.