Film Thickness Measurement

Authored by: François Flory , Ludovic Escoubas

Encyclopedia of Optical and Photonic Engineering

Print publication date:  September  2015
Online publication date:  September  2015

Print ISBN: 9781439850978
eBook ISBN: 9781351247184
Adobe ISBN:

10.1081/E-EOE2-120009494

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Abstract

Over the past few years, there has been a significant increase in research directed at the development and applications of optical methods for surface metrology. This is due to a number of factors such as greater familiarity with laser techniques, availability of new commercial equipment, and developments in solid-state detector arrays and image processing. This entry distinguishes spectrophotometric techniques, ellipsometry, and the m-line technique. Focus will be given to other specific techniques allowing film thickness measurement or profilometry, such as stylus profilometry, laser profilometry, white light interferometry, or atomic force microscopy.

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